中国科学院数学与系统科学研究院期刊网
Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage
GAO Jinhai · HAO Lina · CHENG Hongtai · CAO Ruimin · SUN Zhiyong
Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage
GAO Jinhai · HAO Lina · CHENG Hongtai · CAO Ruimin · SUN Zhiyong
Journal of Systems Science and Complexity . 2019, (5): 1340 -1357 .  DOI: 10.1007/s11424-019-7378-y