Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage

GAO Jinhai · HAO Lina · CHENG Hongtai · CAO Ruimin · SUN Zhiyong

系统科学与复杂性(英文) ›› 2019, Vol. 32 ›› Issue (5) : 1340-1357.

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系统科学与复杂性(英文) ›› 2019, Vol. 32 ›› Issue (5) : 1340-1357. DOI: 10.1007/s11424-019-7378-y

Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage

    GAO Jinhai · HAO Lina · CHENG Hongtai · CAO Ruimin · SUN Zhiyong
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Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage

    GAO Jinhai · HAO Lina · CHENG Hongtai · CAO Ruimin · SUN Zhiyong
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{{article.zuoZheCn_L}}. {{article.title_cn}}. {{journal.qiKanMingCheng_CN}}, 2019, 32(5): 1340-1357 https://doi.org/10.1007/s11424-019-7378-y
{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}, 2019, 32(5): 1340-1357 https://doi.org/10.1007/s11424-019-7378-y
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